著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
K. Sato and M. Shikida and K. Kawasaki,Forming a rounded etched profile by using two-step anisotropic wet etching,MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530),,IEEE,2002-11-11,,,95-100,https://cir.nii.ac.jp/crid/1871991017714375552,https://doi.org/10.1109/mhs.2000.903297