Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yasuhiro Katsumata and C. Yoshino and Hiroomi Nakajima and K. Inou and Sadayuki Yoshitomi and S. Matsuda and Hiroshi Iwai,Three-dimensional mechanical stress analysis of trench isolation along {111} gliding planes,Proceedings of 1994 IEEE International Electron Devices Meeting,,IEEE,2002-12-17,,,885-888,https://cir.nii.ac.jp/crid/1871991017875571200,https://doi.org/10.1109/iedm.1994.383271