Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) M. Kanda and T. Murakami and T. Miyoshi and K. Totsuka and M. Moriuchi and S. Yamada and T. Noguchi and K. Isobe,Cu contamination induced degradation mechanism of embedded flash cell,International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224),,IEEE,2002-11-13,,,32.5.1-32.5.4,https://cir.nii.ac.jp/crid/1872272492353643392,https://doi.org/10.1109/iedm.2001.979612