著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masaharu Shiratani and Kunihiro Kamataki and Yenwoon Seo and Masaru Hori and Tatsuya Urakawa and Makoto Sekine and Giichiro Uchida and Kazunori Koga and Nahi Itagaki and Yuuichi Setsuhara,Control of Deposition Profile and Properties of Plasma CVD Carbon Films,Linköping Electronic Press Workshop and Conference Collection,2003-6523,Linköping University Electronic Press,2013-03-04,2,,136-139,https://cir.nii.ac.jp/crid/1872272492359614208,https://doi.org/10.3384/wcc2.136-139