著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
J. Matsui and M. Shibata and Nobuhiko Nakano and T. Makabe,Toward charging free plasma processes: phase space modeling between pulsed plasma and microtrench,1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100),,American Vacuum Soc,2002-11-27,,,156-159,https://cir.nii.ac.jp/crid/1872272492456989056,https://doi.org/10.1109/ppid.1998.725598