{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1872272492459595264.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1109/cleopr.2013.6600264"}}],"dc:title":[{"@value":"Ultraviolet-induced wavelength trimming of BCB-buried athermal Si slot wavelength filters"}],"description":[{"notation":[{"@value":"Wavelength trimming for athermal Si slot wavelength filter embedded with BCB using DUV exposure was demonstrated. The total shift of 1.21 nm was obtained after exposing 14 J/cm2 of DUV light without any degradation in athermal and propagation characteristics."}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1891147690668796165","@type":"Researcher","foaf:name":[{"@value":"Yuki Atsumi"}]},{"@id":"https://cir.nii.ac.jp/crid/1891147690668796162","@type":"Researcher","foaf:name":[{"@value":"Takeshi Sifer"}]},{"@id":"https://cir.nii.ac.jp/crid/1891147690668796160","@type":"Researcher","foaf:name":[{"@value":"Yusuke Hayashi"}]},{"@id":"https://cir.nii.ac.jp/crid/1891147690668796161","@type":"Researcher","foaf:name":[{"@value":"Shigehisa Arai"}]},{"@id":"https://cir.nii.ac.jp/crid/1891147690668796163","@type":"Researcher","foaf:name":[{"@value":"Nobuhiko Nishiyama"}]},{"@id":"https://cir.nii.ac.jp/crid/1891147690668796164","@type":"Researcher","foaf:name":[{"@value":"JoonHyun Kang"}]}],"publication":{"prism:publicationName":[{"@value":"2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)"}],"dc:publisher":[{"@value":"IEEE"}],"prism:publicationDate":"2013-06-01","prism:startingPage":"1","prism:endingPage":"2"},"dataSourceIdentifier":[{"@type":"OPENAIRE","@value":"doi_dedup___::c399fd3d78813bffa3ed08d866989005"}]}