Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Eiji Higurashi and Masakazu Sugiyama and Ling-Han Li and Akio Higo and Yoshiaki Nakano,InGaAsP optical device integration on SOI platform by Ar/O2plasma assisted bonding,SPIE Proceedings,0277-786X,SPIE,2013-03-13,8616,,86160X,https://cir.nii.ac.jp/crid/1872272492777893376,https://doi.org/10.1117/12.2008337