Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kentaro Matsunaga and Satoshi Tanaka and Kazuo Tawarayama and Shunko Magoshi and Suigen Kyoh and Hajime Aoyama and Yumi Nakajima and Yumi Hayashi and Ichiro Mori,Manufacturability of 2x-nm devices with EUV tool,SPIE Proceedings,0277-786X,SPIE,2011-03-17,7969,,79691L,https://cir.nii.ac.jp/crid/1872272492831459968,https://doi.org/10.1117/12.879333