著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kazuo Sato and Mitsuhiro Shikida and Akihito Matsumuro and Kimiharu Kayukawa and Zakaria Moktadir,Roughness Characterization of Si(110) Etched in TMAH by Atomic Force Microscopy,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1999-01-01,605,,,https://cir.nii.ac.jp/crid/1872272492888302592,https://doi.org/10.1557/proc-605-305