Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Hideaki Yoshida and Takao Wada and Akira Usami and Masaya Ichimura,Contactless Characterization of the Surface Property of the Si+-Implanted GaAs,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1994-01-01,347,,,https://cir.nii.ac.jp/crid/1872272492989741952,https://doi.org/10.1557/proc-347-283