Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) H. Fujita and Koji Ikuta and M. Ikeda and S. Yamashita,Crystallographic analysis of TiNi shape memory alloy thin film for microactuator,"IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.",,IEEE,2002-12-04,,,38-39,https://cir.nii.ac.jp/crid/1872553967715062912,https://doi.org/10.1109/memsys.1990.110243