Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shigemi Yugo and Yoshio Adachi and Song Bao Zhou and Tadamasa Kimura,Formation of silicon carbide layers by the ion beam technique and their electrical properties,Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,0168-583X,Elsevier BV,1989-03-01,39,,238-241,https://cir.nii.ac.jp/crid/1872835442346911360,https://doi.org/10.1016/0168-583x(89)90779-9