High power command charging circuit for high repetition rated laser
説明
A high-power command charging power supply for a high repetition rated excimer laser which has a thyratron main switch was designed and tested, GTOs are used as output devices. The design goal of this power supply was to attain a repetition rate of 5 kHz and output power of 67.5 kW. At the present time, up to 4 kHz and 20 kW have been attained; these values are limited mainly by the capacity of the thyratron switching device. >
収録刊行物
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- Nineteenth IEEE Symposium on Power Modulators
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Nineteenth IEEE Symposium on Power Modulators 153-154, 2002-12-04
IEEE