Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) N. V. Toan and S. Sangu and T. Saitoh and N. Inomata and T. Ono,High Aspect Ratio Sio2 Capillary Based On Silicon Etching And Thermal Oxidation Process For Optical Modulator,,,Zenodo,2015-04-02,,,,https://cir.nii.ac.jp/crid/1872835442606243072,https://doi.org/10.5281/zenodo.1100730