Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
S. Hashitera and K. Tajiri and Yoshikazu Ohtsubo and Satoshi Tadokoro and K. Suzuki and Toshi Takamori and H. Goto,Development of an electrostatic linear actuator by micromachining processes,Proceedings of IECON '93 - 19th Annual Conference of IEEE Industrial Electronics,,IEEE,2002-12-30,,,1808-1813,https://cir.nii.ac.jp/crid/1872835442712231680,https://doi.org/10.1109/iecon.1993.339348