著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masakazu Sugiyama and O. Feron and Yukihiro Shimogaki and Yoshiaki Nakano,An experimental and numerical study of the composition distribution of InGaAsP quaternary materials in a horizontal MOCVD reactor,Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials (Cat. No.00CH37107),,IEEE,2002-11-07,,,368-371,https://cir.nii.ac.jp/crid/1872835442820508160,https://doi.org/10.1109/iciprm.2000.850309