Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Toshishige Shimamura and Yuji Uenishi and T. Kamei and Masaki Yano and Joji Yamaguchi and K. Machida and Yasuyuki Tanabe and K. Kudou and Masami Urano and Hiroyuki Ishii,Fabrication of optical MEMS switches having multilevel mirror-drive electrodes,2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682),,IEEE,2004-06-03,,,121-122,https://cir.nii.ac.jp/crid/1872835442838098816,https://doi.org/10.1109/omems.2003.1233496