Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Carlo Pogliani and Shiaki Murai and Ryugo Hikichi and Giovanni Bianucci and Shoichi Murata and Shigeru Noguchi and Gian Luca Cassol and Luigi Raffaele and Hidenao Katsuki,Characterization and qualification of the Jeol JBX9000-MVII e-beam writer for the 90nm node and its integration in a photomask manufacturing line,SPIE Proceedings,0277-786X,SPIE,2005-10-21,5992,,59924W,https://cir.nii.ac.jp/crid/1872835442849945856,https://doi.org/10.1117/12.632399