Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Takaaki Suzuki and Hidekuni Takao and Hirofumi Yamashita and Fumikazu Oohira and Fusao Shimokawa and Kyohei Terao,Dual-axis hybrid-MEMS mirror having Si and polymer hinges for large-area 2D raster scan,2014 International Conference on Optical MEMS and Nanophotonics,,IEEE,2014-08-01,,,167-168,https://cir.nii.ac.jp/crid/1872835442860953344,https://doi.org/10.1109/omn.2014.6924575