Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masahiro Tawata and Shinzo Morita and Hisato Kato and Shuzo Hattori,Evaporated Fatty Acid Resist Process,SPIE Proceedings,0277-786X,SPIE,1989-08-22,1086,,238,https://cir.nii.ac.jp/crid/1872835442890343936,https://doi.org/10.1117/12.953035