著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hiroshi Tsuji and Kenji Taniguchi and Masayuki Furuhashi and Masayuki Tachi,Role of boron atoms on fluorine difftusion in pre-amorphized silicon,"International Meeting for Future of Electron Devices, 2004.",,IEEE,2006-01-05,,,101-102,https://cir.nii.ac.jp/crid/1872835442920078208,https://doi.org/10.1109/imfedk.2004.1566428