Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Akio Fuwa and Keisuke Anzai and Nílson Kunioshi,Analysis of the dynamics of reactions of SiCl2 at Si(100) surfaces,Applied Surface Science,0169-4332,Elsevier BV,2017-01-01,392,,410-417,https://cir.nii.ac.jp/crid/1872835442931238656,https://doi.org/10.1016/j.apsusc.2016.09.039