著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kiyoshi Takamasu and Shujie Liu and Satoru Takahashi and Shuichi Nagasawa,Profile measurement of resist surface using multi-ball-cantilever AFM,SPIE Proceedings,0277-786X,SPIE,2005-12-05,6049,,604903,https://cir.nii.ac.jp/crid/1872835442938310272,https://doi.org/10.1117/12.647962