著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) M. Sasaki and T. Kanda and M. K. Kurosawa and T. Higuchi,Hydrothermally deposited PZT thin film vibration probe sensor,"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.",,IEEE,2003-10-01,,,449-452,https://cir.nii.ac.jp/crid/1872835443008164224,https://doi.org/10.1109/ultsym.2002.1193439