Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Mitsuo Yamashita and Fumiaki Togoh and Xu Zhao and Masumi Saka,Evaluating the Dominant Factor for Electromigration in High Purities Al Film Deposited by Sputtering,"ASME 2009 InterPACK Conference, Volume 1",,ASMEDC,2009-01-01,,,397-400,https://cir.nii.ac.jp/crid/1873116917363417344,https://doi.org/10.1115/interpack2009-89282