著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
N. Aoki and Masakazu Nakamura and Kazuya Matsuzawa and Y. Oowaki and I. Mizushima,Simulation analysis of impurity profile extraction by SCM,1998 Sixth International Workshop on Computational Electronics. Extended Abstracts (Cat. No.98EX116),,IEEE,2002-11-27,,,267-269,https://cir.nii.ac.jp/crid/1873116917967316608,https://doi.org/10.1109/iwce.1998.742762