著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Toshiya Kotani and Taiga Uno and Hiromitsu Mashita and Masahiro Miyairi,Development of practical flare correction tool for full chip in EUV lithography,SPIE Proceedings,0277-786X,SPIE,2012-03-29,8322,,83221N,https://cir.nii.ac.jp/crid/1873116918062912896,https://doi.org/10.1117/12.916129