Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Minoru Obara and Kazue Ozono and H. Sunakawa and A. Usui,High speed and precise ablation etching of wide band gap GaN semiconductor using high-intensity femtosecond laser,LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080),,IEEE,2002-11-08,2,,561-562,https://cir.nii.ac.jp/crid/1873398392422678400,https://doi.org/10.1109/leos.2000.893965