Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masafumi Kumano and Nan Wang and Shinya Yoshida and Yusuke Kawai and Masayoshi Esashi and Shuji Tanaka,Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture,2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS),,IEEE,2013-01-01,,,197-200,https://cir.nii.ac.jp/crid/1873398392458106880,https://doi.org/10.1109/memsys.2013.6474211