Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Mitchell D. Heins and Ahmad Chatila and D. Cottrell and Robert C. Pack and Victor Vladimir Boksha and T. Vucurevich and K. Shimasaki and M. Bales and C. Neil Berglund and F. James and J. Hogan,GDS-3 initiative: advanced design-through-chip infrastructure for subwavelength technology,SPIE Proceedings,0277-786X,SPIE,2002-07-11,4692,,566-584,https://cir.nii.ac.jp/crid/1873398392465752576,https://doi.org/10.1117/12.475667