Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kazutaka Ishigo and Jerome Depre and Paul Christiaan Hinnen and Takuya Kono and Omar Brioso and Tatsuhiko Higashiki and Ser-Yong Lim and Mir Shahrjerdy and Shinichi Tanaka,Integration of a new alignment sensor for advanced technology nodes,SPIE Proceedings,0277-786X,SPIE,2007-03-16,6520,,652023,https://cir.nii.ac.jp/crid/1873398392476757120,https://doi.org/10.1117/12.712084