著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yuji Morisawa and M. Takeuchi and Isao Kikuma and N. Takayama,Mirror polishing of InP wafer surfaces with NaOCl-citric acid,Applied Surface Science,0169-4332,Elsevier BV,1996-02-01,92,,147-150,https://cir.nii.ac.jp/crid/1873398392611326592,https://doi.org/10.1016/0169-4332(95)00219-7