Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) T. Hoshi and M. Miyashita and A. Kanai,Nanometer Positioning Characteristics of Closed Looped Differential Hydro-or Aerostatic Actuator,CIRP Annals,0007-8506,Elsevier BV,1983-01-01,32,,287-289,https://cir.nii.ac.jp/crid/1873398392700097792,https://doi.org/10.1016/s0007-8506(07)63406-4