著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
So Kamimura and Shirakawa Michihiro and Kosuke Koshijima and Keita Katou,Negative tone development process for ArF immersion extension,SPIE Proceedings,0277-786X,SPIE,2014-10-08,9235,,92350O,https://cir.nii.ac.jp/crid/1873398392824015616,https://doi.org/10.1117/12.2072470