Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kazuo Goda and Masaki Kimura,Prediction of positioning error in EB lithography,SPIE Proceedings,0277-786X,SPIE,2016-03-22,9777,,977717,https://cir.nii.ac.jp/crid/1873398392920562560,https://doi.org/10.1117/12.2218252