著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yoshikazu Ishii and Hisataka Takenaka,<title>Lateral-periodicity evaluation of multilayer Bragg reflector surface roughness using x-ray diffraction</title>,SPIE Proceedings,0277-786X,SPIE,1991-01-01,1345,,180-188,https://cir.nii.ac.jp/crid/1873398392920716544,https://doi.org/10.1117/12.23313