著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kikuo Furukawa and Shoichi Hayakawa and Hiroyasu Tanaka and Hiroki Yamamoto and Hiroyuki Tanagi and Takahiro Kozawa,Development of novel protecting derivatives for chemically amplified extreme ultraviolet resist,SPIE Proceedings,0277-786X,SPIE,2014-03-27,9051,,905127,https://cir.nii.ac.jp/crid/1873679867447244032,https://doi.org/10.1117/12.2045887