Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shingo Houzumi and Shirabe Akita and Noriaki Toyoda and Masahiro Nagano and Isao Yamada and Susumu Yamada,High rate etching of GaAs and GaP by gas cluster ion beams,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2003-01-01,792,,,https://cir.nii.ac.jp/crid/1873679867570895872,https://doi.org/10.1557/proc-792-r9.38