Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Kikuo Yamabe and Keitaro Imai,Stress Effect on Oxidation Kinetics of Silicon with Different Surface Orientations,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1991-01-01,239,,,https://cir.nii.ac.jp/crid/1873679867808408064,https://doi.org/10.1557/proc-239-107