著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hisatake Sano and Mikio Ishikawa and Tadahiko Takikawa and Morihisa Hoga and Naoya Hayashi and Hiroshi Fujita and Satoshi Yusa,CD-measurement technique for hole patterns on stencil mask,SPIE Proceedings,0277-786X,SPIE,2004-12-06,5567,,1107,https://cir.nii.ac.jp/crid/1873679867892551808,https://doi.org/10.1117/12.575371