Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Nobuyuki Yoshioka and Hiroyoshi Ando and Morihisa Hoga and Seiichi Tsuchiya and Hiromichi Hoshi and Junji Hirumi,The study of high-speed electron beam deflection technology for VSB writers,SPIE Proceedings,0277-786X,SPIE,2004-08-20,5446,,681,https://cir.nii.ac.jp/crid/1873961342819963136,https://doi.org/10.1117/12.557759