Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Koji Arimitsu and Atsutaro Yoshizawa and Hiroki Yamamoto and Kazuyuki Enomoto and Seiichi Tagawa and Akihiro Oshima and Takahiro Kozawa,Acid proliferation to improve the sensitivity of EUV resists: a pulse radiolysis study,SPIE Proceedings,0277-786X,SPIE,2011-03-17,7969,,79692M,https://cir.nii.ac.jp/crid/1873961342929103616,https://doi.org/10.1117/12.881672