Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Nakadate Suezou and Masato Shibuya and Junichi Tamaki,Analytical equation predicting the forbidden pattern pitch for phase-shifting mask,SPIE Proceedings,0277-786X,SPIE,2013-04-12,8683,,86832A,https://cir.nii.ac.jp/crid/1874242817256709632,https://doi.org/10.1117/12.2010770