著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tetsuji Dohi and Masataka Hori and Tomohiko Izumizaki,A High Sensitive and Low Parasitic Capacitance Folding Micro Coil with Multilayered Zigzag Diameter Wiring,2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),,IEEE,2020-01-01,,,465-468,https://cir.nii.ac.jp/crid/1874242817257462272,https://doi.org/10.1109/mems46641.2020.9056289