Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Takaaki Tsurumi and Shuichi Ozawa and Satoshi Wada and Masayuki Yamane,Piezoelectric properties of PZT thick film on Si prepared by an interfacial polymerization method,ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076),,IEEE,2002-11-11,1,,89-92,https://cir.nii.ac.jp/crid/1874242817300202368,https://doi.org/10.1109/isaf.2000.941518