著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
M. Kakumu and M. Kinugawa and H.R. Grinolds,Reliability and performance of submicron LDD NMOSFET's with buried As n<sup>-</sup>impurity profiles,1985 International Electron Devices Meeting,,IRE,1985-01-01,,,246-249,https://cir.nii.ac.jp/crid/1874242817332664960,https://doi.org/10.1109/iedm.1985.190942