著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hisataka Hayashi and Toshiyuki Sasaki and Kenichi Yoshikawa and Itsuko Sakai and Makoto Sekine and Masaru Hori and Kazuhito Furumoto,Silver film etching using halogen gas plasma,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2020-08-17,38,,,https://cir.nii.ac.jp/crid/1874242817459101312,https://doi.org/10.1116/6.0000286