Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shiaki M. Murai and Masahiko Takahashi and Hidetaka Saitou and Akihiro Miyake and Hiroyuki Miyashita,Practical phase control technique for alternating phase-shift mask fabrication,SPIE Proceedings,0277-786X,SPIE,2000-07-19,4066,,394,https://cir.nii.ac.jp/crid/1874242817467332352,https://doi.org/10.1117/12.392040