著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Takao Namihira and C.H. Zhang and H. Horita and Hidenori Akiyama and Sunao Katsuki and A. Kimura,An estimation for EUV radiation energy using FLN,"5th IEEE Conference on Nanotechnology, 2005.",,IEEE,2005-09-09,,,843-846,https://cir.nii.ac.jp/crid/1874242817474682496,https://doi.org/10.1109/nano.2005.1500859