Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
S. Sharifzadeh and E. Shamble and M. Ben-Tzur,In-line defect density targets for new technology from development to manufacturing,IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168),,IEEE,2002-11-27,,,171-173,https://cir.nii.ac.jp/crid/1874242817570961408,https://doi.org/10.1109/asmc.1998.731548